Facilities & Capabilities

The RTNN brings together comprehensive shared user facilities and over 100 complementary faculty research programs at the three major research universities within the network. RTNN technical capabilities span nanofabrication and nano-characterization of traditional hard, dry materials (e.g., 2D and 3D nanomaterials, metamaterials, photonics, and heterogeneous integration) and emerging soft, wet materials (e.g., tissue, textile, plant, and animal nanomaterials).

The RTNN connects you with expert technical staff and faculty to provide:

  • Training for users to independently operate equipment.
  • Fabrication and analytical services.
  • Consultation, collaboration, and support for process and instrumentation development.
  • In-person and web-based workshops and interactive demonstrations on state-of-the-art techniques within the network.

Contact the our staff at rtnanonetwork@ncsu.edu to discuss how RTNN can help you.

RTNN technical facilities offer a diverse set of capabilities to its users, including:

Nanofabrication & Cleanroom Capabilities

Class 100 & 1000 Cleanroom Facilities

Lithography Tools

Photolithography: mask aligners, spin coating & developing systems, plasma asher, high-volume patterning system


E-beam Lithography Systems (with integrated SEM capability)


Thermoplastic Nano-Imprinter & Hot Embosser


Molecular Printer


Laser Ablation System


Ion Beam Lithography


Deposition Tools

Atomic Layer Deposition Chambers (including plasma-enhanced & ozone-enhanced)


Chemical Vapor Deposition Chambers (low-pressure & plasma-enhanced for a-Si, SiO2, Si3N4, TEOS oxide)


Physical Vapor Deposition Chambers (RF dielectric & DC sputtering systems, e-beam & thermal evaporators, pulsed laser systems)


Ion Beam-Assisted Deposition


Electroplater (Cu, Ni, Au)


Etching Tools

Reactive Ion Etching Systems (with Ar, O2, H2, SF6, CHF3, Cl, HBr, BCl3, CF4 gases & RF plasma etch tools)


Deep Reactive Ion Etching Systems (with O2, SF6, CF4, C4F8 gases)


Chemical Etch Stations


Thermal Processing Tools

High Temperature Annealing Furnaces (n-type & p-type doping, dry & wet oxidation, high temperature & rapid thermal annealing)


Baking ovens


 

Bio-Processing Bay
(for integration of biomaterials with devices)

Wet Processing Bays

Nano-Fiber Production

Electrospinning (Needle/Syringe, High-throughput Edge/Bowl)


Centrifugal Spinning


Multicomponent Extrusion (Bi-co, Tri-co)

Metrology Tools

Ellipsometer


Interferometers


Reflectometers


Refractometer


Atomic Force Microscope


Profilometers


Optical and Confocal Microscopes


 

Materials Characterization Techniques

Imaging

Scanning Electron Microscopy (SEM)

Field Emission SEM (FE-SEM)


Environmental SEM (ESEM) (including environmental FE-SEM)


Cryogenic SEM (with cold knife fracture, magnetron sputter coater, anti-contaminator, and RGB cathodoluminescence imaging)


Extreme Resolution SEM (XR-SEM) (with transmission detector, concentric backscatter detector, and stage biasing for insulating samples)


Focused Ion Beam (FIB) Milling (with gas injection system for insulator (TEOS), Pt, and W deposition and insulator enhanced etching)


Energy-Dispersive X-ray Spectroscopy (EDS) (on FE-SEM, ESEM, XR-SEM, and FIB microscopes)


Electron Backscatter Diffraction (EBSD) (on FIB/FE-SEM microscope)


in situ Analysis (heating, cooling, electrical biasing, mechanical loading)


Transmission Electron Microscopy (TEM)

Conventional & High Resolution TEM with EDS


Aberration-Corrected Scanning TEM (STEM) with Atomic-Resolution Chemical Mapping (both EDS and Electron Energy Loss Spectroscopy (EELS))


Cryogenic TEM


3D Electron Tomography


in situ Analysis (heating, electrical biasing, liquid cell)


High Resolution X-Ray Computed Tomography (microCT & nanoCT)

High Resolution X-Ray Fluorescence Microscopy (HR-micro-XRF)

In partnership with European Centre of Research and Teaching of Geosciences of the Environment (CEREGE) at Aix-Marseille University


Neutron Imaging

Neutron Radiography


3D Neutron Tomography


Optical Microscopy

High Magnification Optical Microscopy


Micro-spectrophotometry (UV-Vis-NIR & Raman)


Confocal Microscopy (including fluorescence imaging)


Structural & Defect Analysis

X-Ray Diffraction (XRD)

Bragg-Brentano & Parallel Beam Geometries (with Eulerian cradle attachments)


Grazing Incidence XRD (GIXRD)


General Area Detector Diffraction System (GADDS)


in situ Analysis (heating & cooling, vacuum, inert & reactive gases, electrical biasing)


X-Ray Reflectometry (XRR)
Small Angle X-Ray Scattering (SAXS)
Neutron Diffraction
High Resolution Nuclear Magnetic Resonance (NMR) Spectroscopy
Fourier Transform Infrared (FTIR) Spectroscopy
Raman Spectroscopy

Positron Annihilation Lifetime Spectroscopy

Na-22 Bulk Analysis


Intense Positron Beam Surface-Sensitive Analysis


Doppler Broadening Spectroscopy


Surface Analysis

X-Ray Photoemission Spectroscopy (XPS)

Spot Analysis & Mapping


Ultraviolet Photoemission Spectroscopy (UPS)
Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

Scanning Probe Microscopy (SPM)

Atomic Force Microscopy (AFM)


Magnetic Force Microscopy (MFM)


Electrostatic Force Microscopy (EFM)


Conductive AFM / Current-Voltage Spectroscopy


Force-Distance Spectroscopy


Nanolithography & Nano-manipulation


Simultaneous Optical Microscopy


Chemical Analysis

Chromatography

Ion Chromatography (IC)


High Performance Liquid Chromatography (HPLC)


Gas Chromatography Time-of-Flight Mass Spectrometry (GC-TOFMS)


Pyrolysis GC-TOFMS


Spectroscopy

Ultraviolet-Visible (UV-Vis) Spectrophotometry


Near Infrared (NIR) Spectroscopy


Raman Spectroscopy


Thermal Analysis

Thermogravimetric analysis (TGA)


Differential Scanning Calorimetry (DSC)


BET Surface Area / Physisorption Analysis

Specimen Preparation

Centrifuges


Incubator shakers


Soxhlet extraction units


Biosafety hood


Autoclaves


Property Characterization

Nanoindentation
Ultraviolet-Visible-Near Infrared (UV-Vis-NIR) Spectrophotometry
Micro-Strain Analysis
Dynamic Mechanical Analysis
Four Probe Electrical Testing
Seebeck/Thermal Conductivity Testing
Shielded RF Anechoic Chamber Antenna & Electrical Testing

Solar Cell Device Testing

Solar Simulator


Quantum Efficiency Measurement System


Fabric, Fiber & Yarn Physical Testing

Sample Preparation

Cryo-ultramicrotomy
Ion Milling
Critical Point Drying
Grinding, Polishing & Dicing
Sputter Coaters

Facilities for Environmental Impact Analysis & Biofuel Plants

Contained Environmental Impact Facilities

Heavily-Instrumented, Tightly-Controlled Mesocosm Facilities (continuous monitoring of air and water
temperature, redox potential, water level, air pressure and humidity with evaluation of impact on
plants, fish, and bacteria
)


Aquatic Research Facility (static and flow-through systems for both holding and exposing fish,
approved for hazardous chemicals and radiolabeled compounds
)


Treatment Wetland Macroscosms (real-time data for water quality, stream flow, lake and ground water
levels, and climate information with over five years of background data
)


Heavily-Instrumented Microcosm Tanks (temperature-, pH-, and redox-controlled)


Chemical Analysis & Microbial Labs


Ultra Cleanroom


Radioisotope Facility


Laboratory-Scale Simulation of Atmospheric Flow and Pollutant Dispersion

In partnership with Environmental Flow Research Centre (EnFlo) at the University of Surrey


Biofuel Pilot Plants

Pilot Biorefinery (biomass to ethanol and other bioproducts)


Biodiesel Pilot Plant


Torrefaction Pilot Plant



Our Facilities & Centers

The RTNN leverages the resources of the following facilities and programs at NC State, Duke, and UNC-CH:

SMIF

Shared Materials Instrumentation Facility

Director: Mark Walters
Contact Email: mark.walters@duke.edu

NNF

NCSU Nanofabrication Facility

Director: Daniel Stancil
Contact Email: ddstanci@ncsu.edu

AIF

Analytical Instrumentation Facility

Director: Jacob Jones
Contact Email: jacobjones@ncsu.edu

CHANL

Chapel Hill Analytical and Nanofabrication Laboratory

Director: Carrie Donley
Contact Email: cdonley@email.unc.edu

DMRSC

Duke Magnetic Resonance Spectroscopy Center

Director: Len Spicer
Contact Email: spicer@biochem.duke.edu

ZTE

Zeis Textiles Extension for Economic Development

Director: Jon Rust
Contact Email: jrust@ncsu.edu

PULSTAR

Nuclear Reactor Program, PULSTAR Reactor

Director: Ayman Hawari
Contact Email: ayman.hawari@ncsu.edu

CEINT

Center for the Environmental Implications of Nanotechnology

Director: Mark Wiesner
Contact Email: wiesner@duke.edu

PCOST

Public Communication of Science & Technology Project

Director: David Berube
Contact Email: dmberube@ncsu.edu

Forest Biomaterials Analytical Laboratory

Department of Forest Biomaterials

Director: David Tilotta
Contact Email:  dave_tilotta@ncsu.edu


Local Resources

Research, Engagement, and Capabilities Hub of North Carolina ( REACH NC )
REACH NC is a web portal that enables users to search, browse, and find thousands of experts and assets within North Carolina higher education and research institutions.

North Carolina Small Business and Technology Development Center ( SBTDC )
The SBTDC is the business and technology extension service of The University of North Carolina and is committed to providing knowledge, education, and other supportive resources that enable existing small and mid-sized businesses, emerging entrepreneurs, and local / state leaders to innovate and succeed.